ISO 14644 Series: Cleanroom Standards
ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. As cleanrooms became more sophisticated, the need for wider ranging standards was recognized. The need for a single standard for cleanroom classification and testing was long felt. This lead to the formation of ISO Technical Committee 209. The goal of ISO TC 209 was the "standardization of equipment, facilities, and operational methods for cleanrooms and associated controlled environments."
DOCUMENT
TITLE
STATUS
DESCRIPTION
ISO 14644-1
Classification of air cleanliness by particle concentration
ANSI Standard 2015
Covers the classification of air cleanliness in cleanrooms and associated controlled environments.
ISO 14644-2
Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ANSI Standard 2015
Specifies requirements for monitoring and periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1.
ISO 14644-3
Test methods
ANSI Standard 2005
Specifies test methods for designated classification of airborne particulate cleanliness for characterizing the performance of cleanrooms and clean zones.
ISO/DIS 14644-3
Test methods
DIS December 2016
This new Draft International Standard updates "textbook" guidance that has been in use since 2005 and sets out appropriate test methods for measuring the performance of an installation, a cleanroom, or an associated controlled environment.
ISO 14644-4
Design, construction, and start-up
ANSI Standard 2001
Specifies requirements for the design and construction of cleanroom installations.
ISO 14644-5
Operations
ANSI Standard Aug. 2004
Specifies basic requirements for cleanroom operations.
ISO