Model |
IM-7030 |
Type |
Head; wide stage model incorporating programmable ring-illumination/light probe unit |
Image sensor |
1” 6.6 mega pixel monochrome CMOS |
Display |
10.4” LCD monitor (XGA: 1024 × 768) |
Receiver lens |
Double telecentric lens |
Field of view |
Wide-field measurement mode: 300mm × 200mm (11.81" × 7.87") (4× R50)
High-precision measurement mode: 225mm × 125mm (8.86" × 4.92") |
Minimum display unit |
0.1µm |
Repeatability - W/o stage movement |
Wide-field measurement mode: ±1µm
High-precision measurement mode: ±0.5µm |
Repeatability - With stage movement |
Wide-field measurement mode: ±2µm
High-precision measurement mode: ±1.5µm |
Measurement accuracy (±2σ) - W/o binding |
Wide-field measurement mode: ±5µm
High-precision measurement mode: ±2µm |
Measurement accuracy (±2σ) - With binding |
Wide-field measurement mode: ±(7 + 0.02 L) µm
High-precision measurement mode: ± (4 + 0.02 L) µm |
Measurable area (XY) |
190 × 90 mm (7.48" × 3.54") |
Maximum measurement depth |
30 mm (1.18") |
Light probe diameter |
ø3mm |
Measuring force |
0.015N |
Repeatability |
±2µm |
Measurement accuracy |
±(8 + 0.02 L) µm |
External remote input |
Non-voltage input (with and without contact) |
External output - OK/NG/FAIL/MEAS |
PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower |
Interface - LAN |
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
Interface - USB 2.0 series A |
6 ports (front: 2, rear: 4) |
Record - Hard disk drive |
500GB |
Illumination system - Transparent |
Telecentric transparent illumination |
Illumination system - Ring |
Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric) |
XY stage - Moving range |
200 × 100mm (7.87" × 3.94") (electric) |
XY stage - Withstand load |
7.5 kg |
Z stage - Moving range |
75 mm (2.95") electric |
Power supply - Power voltage |
100-240 VAC, 50/60 Hz |
Power supply - Power consumption |
430 VA or lower |
Environmental resistance - Ambient temperature for usage |
+10°C to 35°C (+50°F to 95°F) |
Environmental resistance - Ambient humidity for usage |
20% RH to 80% RH (no condensation) |
Weight |
Approx. 33 kg |